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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

《机械工程前沿（英文）》 2013年第8卷第2期页码 146-149 doi: 10.1007/s11465-013-0260-z

摘要：

To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.

关键词： Micro-Electro-Mechanical Systems (MEMS) micro accelerometer force-balanced micro accelerometer frequency error sensitivity

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变面积结构微机械电容式加速度传感器

李宝清,陆德仁,王渭源

《中国工程科学》 2000年第2卷第2期页码 36-40

摘要：

文章首次报道了一种基于面积可变电容结构的微机械加速度传感器。质量块呈栅状结构，由悬臂梁支撑。两组交叉放置的定电极位于质量块的正下方。在惯性力的作用下，质量块呈平行于衬底水平移动，引起由质量块的栅与定电极的叉指构成的差分电容变化。通过测量差分电容的变化，可以得到加速信号的大小。理论分析表明加速度响应信号随面积呈线性变化，而与质量块及定电极的间距无关。加速度传感器的制作采用了基于金属电镀的准LIGA技术，设计量程为20m/s²。测量结果表明，加速度传感器量程为20m/s²，灵敏度为58.1mV/(m·s^-2)，非线性为4%FS。讨论了器件线性度不够理想的原因。

关键词：电容加速度传感器变面积

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Machinability of ultrasonic vibration-assisted micro-grinding in biological bone using nanolubricant

《机械工程前沿（英文）》 2023年第18卷第1期 doi: 10.1007/s11465-022-0717-z

摘要： Bone grinding is an essential and vital procedure in most surgical operations. Currently, the insufficient cooling capacity of dry grinding, poor visibility of drip irrigation surgery area, and large grinding force leading to high grinding temperature are the technical bottlenecks of micro-grinding. A new micro-grinding process called ultrasonic vibration-assisted nanoparticle jet mist cooling (U-NJMC) is innovatively proposed to solve the technical problem. It combines the advantages of ultrasonic vibration (UV) and nanoparticle jet mist cooling (NJMC). Notwithstanding, the combined effect of multi parameter collaborative of U-NJMC on cooling has not been investigated. The grinding force, friction coefficient, specific grinding energy, and grinding temperature under dry, drip irrigation, UV, minimum quantity lubrication (MQL), NJMC, and U-NJMC micro-grinding were compared and analyzed. Results showed that the minimum normal grinding force and tangential grinding force of U-NJMC micro-grinding were 1.39 and 0.32 N, which were 75.1% and 82.9% less than those in dry grinding, respectively. The minimum friction coefficient and specific grinding energy were achieved using U-NJMC. Compared with dry, drip, UV, MQL, and NJMC grinding, the friction coefficient of U-NJMC was decreased by 31.3%, 17.0%, 19.0%, 9.8%, and 12.5%, respectively, and the specific grinding energy was decreased by 83.0%, 72.7%, 77.8%, 52.3%, and 64.7%, respectively. Compared with UV or NJMC alone, the grinding temperature of U-NJMC was decreased by 33.5% and 10.0%, respectively. These results showed that U-NJMC provides a novel approach for clinical surgical micro-grinding of biological bone.

关键词： micro-grinding biological bone ultrasonic vibration (UV) nanoparticle jet mist cooling (NJMC) grinding force grinding temperature

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bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force

《机械工程前沿（英文）》 2023年第18卷第2期 doi: 10.1007/s11465-023-0747-1

摘要： Capacitive sensors are efficient tools for biophysical force measurement, which is essential for the exploration of cellular behavior. However, attention has been rarely given on the influences of external mechanical and internal electrical interferences on capacitive sensors. In this work, a bionic swallow structure design norm was developed for mechanical decoupling, and the influences of structural parameters on mechanical behavior were fully analyzed and optimized. A bionic feather comb distribution strategy and a portable readout circuit were proposed for eliminating electrostatic interferences. Electrostatic instability was evaluated, and electrostatic decoupling performance was verified on the basis of a novel measurement method utilizing four complementary comb arrays and application-specific integrated circuit readouts. An electrostatic pulling experiment showed that the bionic swallow structure hardly moved by 0.770 nm, and the measurement error was less than 0.009% for the area-variant sensor and 1.118% for the gap-variant sensor, which can be easily compensated in readouts. The proposed sensor also exhibited high resistance against electrostatic rotation, and the resulting measurement error dropped below 0.751%. The rotation interferences were less than 0.330 nm and (1.829 × 10⁻⁷)°, which were 35 times smaller than those of the traditional differential one. Based on the proposed bionic decoupling method, the fabricated sensor exhibited overwhelming capacitive sensitivity values of 7.078 and 1.473 pF/µm for gap-variant and area-variant devices, respectively, which were the highest among the current devices. High immunity to mechanical disturbances was maintained simultaneously, i.e., less than 0.369% and 0.058% of the sensor outputs for the gap-variant and area-variant devices, respectively, indicating its great performance improvements over existing devices and feasibility in ultralow biomedical force measurement.

关键词： micro-electro-mechanical system capacitive sensor bionics operation instability mechanical and electrical decoupling biomedical force measurement

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利用微机电系统技术制作弯曲结构表面无线无源柔性加速度计 Research Article

李晨1,2,贾蔓谷1,洪应平2,薛亚楠2,熊继军2

《信息与电子工程前沿（英文）》 2022年第23卷第5期页码 801-809 doi: 10.1631/FITEE.2100236

摘要：提出一种LC无线无源柔性加速度计，解决测量弯曲结构表面加速度的困难。该加速度计由柔性聚酰亚胺（PI）衬底和平面螺旋电感（厚度为300 nm）组成，采用微机电系统（MEMS）技术，可任意弯曲或折叠，可牢固地粘附在具有弯曲结构的物体表面。利用射频无线传输原理，通过改变加速度计与天线之间的距离来测量加速度信号。与带导线的加速度计相比，该加速度计可以防止导线在振动过程中脱落，从而延长其使用寿命。通过搭建实验平台，当天线与加速度计之间的距离为5 mm时，在弯曲结构表面展示了加速度计在20至100 m/s2加速度下的传感能力。结果表明，加速度和峰峰值输出电压接近线性，加速度计灵敏度高达0.27 mV/(m•s−2)。此外，该加速度计的最大误差小于0.037%。

关键词：弯曲结构表面；柔性加速度计；微机电系统（MEMS）技术；无线非接触式测量

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3D finite element prediction of chip flow, burr formation, and cutting forces in micro end-milling of

A. DAVOUDINEJAD, P. PARENTI, M. ANNONI

《机械工程前沿（英文）》 2017年第12卷第2期页码 203-214 doi: 10.1007/s11465-017-0421-6

摘要：

Predictive models for machining operations have been significantly improved through numerous methods in recent decades. This study proposed a 3D finite element modeling (3D FEM) approach for the micro end-milling of Al6061-T6. Finite element (FE) simulations were performed under different cutting conditions to obtain realistic numerical predictions of chip flow, burr formation, and cutting forces. FE modeling displayed notable advantages, such as capability to easily handle any type of tool geometry and any side effect on chip formation, including thermal aspect and material property changes. The proposed 3D FE model considers the effects of mill helix angle and cutting edge radius on the chip. The prediction capability of the FE model was validated by comparing numerical model and experimental test results. Burr dimension trends were correlated with force profile shapes. However, the FE predictions overestimated the real force magnitude. This overestimation indicates that the model requires further development.

关键词： 3D finite element modeling micro end-milling cutting force chip formation burr formation

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Heavy vehicle dynamics with balanced suspension based on enveloping tire model

Yongjie LU, Shaopu YANG, Shaohua LI

《机械工程前沿（英文）》 2010年第5卷第4期页码 476-482 doi: 10.1007/s11465-010-0120-z

摘要： The tire-road contact mechanics is the key problem in vehicle ride comfort and road-friendliness research. A flexible roller contact (FRC) tire model with the enveloping property is introduced to reflect the contact history between the tire and the road. Based on D’Alembert principle, an integral balanced suspension (IBS) model is established, considering mass and moment of? inertia of? the stabilizer rod. ?The sprung mass accelera- tion and tire dynamic force for balanced suspension and the traditional quarter-vehicle model are compared respectively for frequency and time domain responses. It is concluded that the quarter-vehicle model can be used to evaluate the ride comfort of vehicles; however, it has some limitations in evaluating the vehicle road-friendliness. Then, the dynamics performances for IBS model are analyzed with the single point contact (SPC) model and FRC model, respectively. These works are expected to propose a new idea for the vehicle-road interaction research.

关键词： heavy vehicle integral balanced suspension enveloping properties ride comfort road-friendliness

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Review of challenges and strategies for balanced urban–rural environmental protection in China

Beidou XI,Xiaoguang LI,Jixi GAO,Ying ZHAO,Hongliang LIU,Xunfeng XIA,Tianxue YANG,Lieyu ZHANG,Xuan JIA

《环境科学与工程前沿（英文）》 2015年第9卷第3期页码 371-384 doi: 10.1007/s11783-014-0744-z

摘要： With the rise of environmentalism in China, great efforts have been devoted to environmental protection over the past several decades. Compared with urban environmental protection, rural environmental protection has not been attached enough importance in China due to the dual-track structure of socio-economic development. As a result, rural China is shouldering disproportionally heavy environmental burdens partly because of the differences and biases between urban and rural environmental protection seen in environmental policies, environmental rights and interests, environmental protection investment, and the environmental protection awareness of people. To eliminate the gap between rural and urban environmental protection, and achieve the goal of “balanced urban–rural environmental protection” (BUREP), government should consider mapping out proper policies and strategies. In this paper we put forward an innovative strategy of BUREP against the background of China’s urban-rural environmental protection. First, we review the current status of rural environmental protection status and its challenges compared with urban environmental protection in China. Secondly, we analyzed the main driving factors and reasons deeply, and then we put forward the BUREP strategy base on the unequal status between urban and rural environment. Finally, we proposed the framework of BUREP. This study may serve as a scientific reference regarding decision-making in coordinating urban and rural environmental protection and in constructing the new countryside of China.

关键词： urban environment rural environment balanced urban–rural environmental protection framework of balanced urban–rural environmental protection (BUREP)

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Modeling limit force capacities of high force to volume lead extrusion dampers

《结构与土木工程前沿（英文）》 2021年第15卷第3期页码 609-622 doi: 10.1007/s11709-021-0724-x

摘要： Lead extrusion dampers are supplemental energy-dissipation devices that are used to mitigate seismic structural damage. Small volumetric sizes and high force capacities define high-force-to-volume (HF2V) devices, which can absorb significant response energy without sacrificial damage. However, the design of such devices for specific force capacities has proven difficult based on the complexities of their internal reaction mechanisms, leading to the adoption of empirical approaches. This study developed upper- and lower-bound force capacity estimates from analytical mechanics based on direct and indirect metal extrusion for guiding design. The derived equations are strictly functions of HF2V device geometric parameters, lead material properties, and extrusion mechanics. The upper-bound estimates from direct and indirect extrusion are denoted as (F_UB,1, F_UB,2) and (F_UB,3, F_UB,4), respectively, and the lower-bound estimates are denoted as (F_LB, F_LB,1) based on the combination of extrusion and friction forces. The proposed models were validated by comparing the predicted bounds to experimental force capacity data from 15 experimental HF2V device tests. The experimental device forces all lie above the lower-bound estimates (F_LB, F_LB,1) and below the upper-bound estimates (F_UB,1, F_UB,2, F_UB,4). Overall, the (F_LB, F_UB,2) pair provides wider bounds and the (F_LB,1, F_UB,4/F_UB,1) pair provides narrower bounds. The (F_LB,1, F_UB,1) pair has a mean lower-bound gap of 36%, meaning the lower bound was 74% of the actual device force on average. The mean upper-bound gap was 33%. The bulge area and cylinder diameter of HF2V devices are key parameters affecting device forces. These relatively tight bounds provide useful mechanics-based predictive design guides for ensuring that device forces are within the targeted design range after manufacturing.

关键词： extrusion lead dampers upper and lower bound analytical modelling limit force

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静电力驱动的悬臂梁微型电场传感器件 Article

韩志飞, 胡军, 李立浧, 何金良

《工程（英文）》 2023年第24卷第5期页码 184-191 doi: 10.1016/j.eng.2022.06.017

摘要：

随着智能电网和能源互联网的发展，大规模实时电压/电场监测成为电力系统的迫切需求，这依赖于先进传感器件的大规模布置。电场测量在电力系统中具有重要意义。一方面，基于电场测量的电压反演可以实现高电压的非接触式测量，替代传统高压互感器，从而减少测量设备绝缘成本和安装难度；另一方面，电场测量还可以被应用于设备故障诊断、雷电预警、电磁环境测量等应用场景。传统的电场测量设备，如场磨等，往往体积大、成本高，无法大规模灵活布置。本文提出了一种静电力驱动的压阻式微型电场传感器。传感器被设计为四悬臂结构，悬臂在静电力的驱动下产生位移和应变，通过压阻材料转化为可测信
号。所提出的传感器具有尺寸小、成本低、功耗低、易于批量生产的优点。同时，该传感器还具有高信噪比、高分辨率及宽电场测量范围的特点。实验结果表明，所提出的传感器具有1.1~1100.0 kV·m⁻¹的线性测量范围、112 V·m⁻¹·Hz^−1/2的交流电场分辨率以及496 Hz的截止频率。这一微型电场传感器将在智能电网及能源互联网中具有广泛的应用价值。

关键词：微型传感器电气传感器件微加工工艺压阻器件

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基于平衡记分卡的连锁经营企业绩效评价研究

曹杰,曹国,何建敏

《中国工程科学》 2008年第10卷第4期页码 90-96

摘要：

以平衡记分卡（BSC）为基础，从BSC的财务、客户、内部经营过程以及学习与成长等方面，设计了连锁经营企业的绩效考核指标体系与模糊综合评判模型，克服了传统评价体系的不足，有利于从成长的角度全面评价连锁企业绩效。

关键词：平衡记分卡连锁经营绩效评价模糊综合评价

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Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

《机械工程前沿（英文）》 2017年第12卷第4期页码 539-545 doi: 10.1007/s11465-017-0427-0

摘要：

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuit board by a low-cost hybrid process of thin-film deposition and circuit printing. The micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuits, and good sensing performance. The sensor, which adheres to an object surface, can detect the surface flow around the object. In our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect the surface flow variation around the aircraft wing and deduce the aerodynamic parameters of the MAVs in flight. Wind tunnel experiments using the sensors integrated with the MAVs are also conducted.

关键词： micro flow sensor flexible sensor surface flow sensing aerodynamic parameter micro aerial vehicle (MAV)

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Degree of bending of concrete-filled rectangular hollow section K-joints under balanced-axial loadings

Rui ZHAO; Yongjian LIU; Lei JIANG; Yisheng FU; Yadong ZHAO; Xindong ZHAO

《结构与土木工程前沿（英文）》 2022年第16卷第4期页码 461-477 doi: 10.1007/s11709-022-0818-0

摘要： It has been found that the fatigue life of tubular joints is not only determined by the hot spot stress, but also by the stress distribution through the tube thickness represented as the degree of bending (DoB). Consequently, the DoB value should be determined to improve the accuracy of fatigue assessment for both stress-life curve and fracture mechanics methods. Currently, no DoB parametric formula is available for concrete-filled rectangular hollow section (CFRHS) K-joints, despite their wide use in bridge engineering. Therefore, a robust finite element (FE) analysis was carried out to calculate the DoB of CFRHS K-joints under balanced-axial loading. The FE model was developed and verified against a test result to ensure accuracy. A comprehensive parametric study including 190 models, was conducted to establish the relationships between the DoBs and four specific variables. Based on the numerical results, design equations to predict DoBs for CFRHS K-joints were proposed through multiple regression analysis. A reduction of 37.17% was discovered in the DoB, resulting in a decrease of 66.85% in the fatigue life. Inclusively, the CFRHS K-joints with same hot spot stresses, may have completely different fatigue lives due to the different DoBs.

关键词： fatigue assessment K-joint design equations degree of bending fracture mechanics

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类差分平衡函数的性质及其应用

张文英,李世取

《中国工程科学》 2004年第6卷第3期页码 45-52

摘要：

定义了布尔函数的类差分和类差分平衡函数，研究了类差分平衡函数的密码学性质以及构造方法。作为类差分平衡函数的应用，给出了〓上逻辑函数是完全非线性函数的充要条件，并在首先分析得到所有四元类差分平衡函数的基础上，编程搜索出〓上所有的完全非线性函数。

关键词： Bent函数完全非线性函数 2-基展开类差分类自相关函数类差分平衡函数

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Quality control based on electrode displacement and force in resistance spot welding

Chuntao JI, Lipeng DENG

《机械工程前沿（英文）》 2010年第5卷第4期页码 412-417 doi: 10.1007/s11465-010-0114-x

摘要： The behaviors of electrode displacement and force during spot welding under various conditions, such as different weld currents, electrode forces, and welding times, were studied. Tests were conducted on a 170?kVA MFDC spot welder. Data were collected via a multichannel high-speed data acquisition system and were analyzed with MATLAB. Behaviors of 5182 aluminum and mild steel in spot welding were compared. Results show that nugget expansion rate does not reach zero for aluminium as it does for mild steel as nugget grew to a certain size. A linear relationship is found between the nugget size and maximum expansion that facilitates online weld quality evaluation. An electrode force peak is observed and believed relevant to the sufficient nugget size.

关键词： aluminum electrode displacement electrode force nugget size data acquisition